- 加工定制：是
- 品牌：
- 型号：
- 工作室尺寸：
- 温度范围：
- 温度波动度：
- 温度均匀度：
- 腐蚀物沉降量：
半导体晶圆表面蚀刻技术是利用电浆（等离子）对晶圆表面进行浸食，此时会产生微粒子，金属污染，氧元素分解等诸多问题。
我司提供的蚀刻备件得到全世界众多知名大厂的认可并一直使用。
以下为我司要以提供的产品及对应设备列表。
也可以根据客户图纸要求或是客户的具体要求来对产品进行修改。
no. maker wafer size oem no. part name material
1 amat 200 020000261 chamber insert 200mm al2o3
2 amat 200 020000468 imp feedthru insulator al2o3
3 amat 200 020000624 ncrs purge ring, wxz+ al2o3
4 amat 200 020000632 ring shadow(3mm)ncrs al2o3
5 amat 200 020000945 capture ring al2o3
6 amat 200 020001009 modified top nozzle aln
7 amat 200 020009083 quartz shield quartz
8 amat 200 020010284 lift pin bk al2o3
9 amat 200 020010377 single ring al2o3
10 amat 200 020018081 cover low profile al2o3
11 amat 200 020018095 collar mincontact_teltec al2o3
12 amat 200 020018109 ceramic collar_hhnec al2o3
13 amat 200 020020055 insulator antenae pcii ti ped quartz
14 amat 200 020020285 pedestal cover upper 8 al2o3
15 amat 200 020020331 imp cover ring al2o3
16 amat 200 020035287 ceramic base al2o3
17 amat 200 020035290 housing gas feed bkceramic base al2o3
18 amat 200 020035291 plug gas nozzle bk al2o3
19 amat 200 020035293 window manometer port bk al2o3
20 amat 200 020035295 housing gas feed dps a3 ch bk al2o3
21 amat 200 020035296 gas plug bk al2o3
22 amat 200 020035576 hp txz lid isolator_polishing repair al2o3
23 amat 200 020035611 lid liner screw(ceramic) bk al2o3
24 amat 200 020036659 shadow ring (q'tz) quartz
25 amat 200 020036686 ceramic single ring al2o3
26 amat 200 020039133 window end point port al2o3
27 amat 200 020039135 window manometer port al2o3
28 amat 200 020039137 dps poly dome al2o3
29 amat 200 020039144 ring focus 195mm snnf 1.38 al2o3
30 amat 200 020040126 thin blade(ceramic) al2o3
31 amat 200 020050132 capture ring al2o3
32 lam 200 716330045001 ring edge 9408 esc 202_hc al2o3
33 lam 200 716330045002 (l)edge ring(ptx)￠202 al2o3
34 lam 200 716330120001 ceramic window flat al2o3
35 lam 200 716330890001 uniformity ring al2o3
36 lam 200 716330892007 alliance 9600 gdp al2o3
37 lam 200 716331051006 uniformity ring al2o3
38 novellus 200 1510992100 cpec_200mm aln
39 novellus 200 1515818500 nano clean ce tube al2o3
40 tel 200 181032902211 adapter liner (y2o3 coating) metal
41 tel 200 1d1030401012 ring shield b3 al2o3
42 amat 300 001028101 producer lift pin hoop al2o3
43 amat 300 002005896 ring deposition clean cip2 al2o3
44 amat 300 002143884 dpsii poly al lift pin y2o3
45 amat 300 003052157 clamp lower center gas feed al2o3
46 amat 300 020000576 pin weight al2o3
47 amat 300 020000933 screw cover (dps2) al2o3
48 amat 300 020000970 ceramic lid al2o3
49 amat 300 020001326 insulator source adaptor ceramic al2o3
50 amat 300 020001427 isolator ceramic cvd al2o3
51 amat 300 020001461 gas nozzle al2o3
52 amat 300 020001521 blade al2o3
53 amat 300 020001766 manifold al2o3
54 amat 300 020001863 ceramic esc cover al2o3
55 amat 300 020001991 ring finger lift producer al2o3
56 amat 300 020002262 insulator coil support aln
57 amat 300 020002396 liner ceramic middle al2o3
58 amat 300 020002421 isolator lid top ceramic al2o3
59 amat 300 020002469 manifold al2o3
60 amat 300 020002747 ceramic lid (dps2) al2o3
61 amat 300 020002967 ceramic injector (dps2) al2o3
62 amat 300 020002972 pumping liner cchannel al2o3
63 amat 300 020003200 ceramic capture ring c type dps 2 al2o3
64 amat 300 020003314 lift 170 fixed floating 300 al2o3
65 amat 300 020003317 ceramic cover ring c type 300mm dps 2 al2o3
66 amat 300 020003433 esc ceramic bushing al2o3
67 amat 300 020003598 ceramic lid al2o3
68 amat 300 020003837 internal insulator al2o3
69 amat 300 020003969 pumping liner sr top al2o3
70 amat 300 020004086 shadow ring aln
71 amat 300 020004146 top liner(pro) al2o3
72 amat 300 020004294 top baffle_8 hole_aln aln
73 amat 300 020004372 gas nozzle middle (sti) aln
74 amat 300 020004474 producer ceramic holder ￠7.2 al2o3
75 amat 300 020004654 pumping liner top sih4 producer se al2o3
76 amat 300 020004864 ceramic plug al2o3
77 amat 300 020004969 weldment al2o3
78 amat 300 020005003 opus gas injector_y2o3 al2o3
79 amat 300 020005031 plug slit cover al2o3
80 amat 300 020005081 side nozzle 1.76 aln 14mils aln
81 amat 300 020005465 gas injector(ae poly) al2o3
82 amat 300 020005593 amat hdp ultima aln baffle aln
83 amat 300 020005896 noarc deposition ring al2o3
84 amat 300 020005912 lift pin y2o3
85 amat 300 020005959 g5 single ring quartz
86 amat 300 020006404 opus ceramic lid al2o3
87 amat 300 020006405 ceramic lid al2o3
88 amat 300 020006504 ultima top nozzle aln
89 amat 300 020006615 g5 lid y2o3
90 amat 300 020006616 minos gas injector y2o3
91 amat 300 020006641 opus focus ring al2o3
92 amat 300 020006702 producer lift pin guide al2o3
93 amat 300 020006801 side nozzle φ0.46 aln
94 amat 300 020006840 producer lift pin al2o3
95 amat 300 020006842 producer lift pin holder al2o3
96 amat 300 020007102 ges g5 injector y2o3
97 amat 300 020007916 lift pin al2o3
98 amat 300 020007917 lift weight al2o3
99 amat 300 020007956 lift pin 139 triangular (y2o3) al2o3
100 amat 300 020007957 lift pin weight al2o3
101 amat 300 020020492 imp coil support cap2 al2o3
102 amat 300 020020494 imp coil support cap1 al2o3
103 amat 300 020076050 cover,300mm pedestal b101,ce al2o3
104 amat 300 020076057 ring,cover 300mm b101 imp al2o3
105 amat 300 020004593 dps poly lift pin al2o3
106 amat 300 020006870 deposition ring al2o3
107 lam 300 715330825006 manifold liner al2o3
108 lam 300 715331211002 chamber wall liner al2o3
109 lam 300 716003473802 (acme) ceramic gas injector al2o3
110 lam 300 716003481822 lam kiyo cx window al2o3
111 lam 300 716026652832 base focus ring al2o3
112 lam 300 716031257561 top edge ring y2o3
113 lam 300 716031257839 ceramic edge ring al2o3
114 lam 300 716057993003 kiyo ex ceramic gas injector al2o3, y2o3
115 lam 300 716067667005 ceramic top edge ring_ct (t14.9) al2o3
116 lam 300 716140163261 hot edge ring 15deg esc silicon
117 lam 300 716800330062 insulator bot esc tapped al2o3
118 lam 300 716065573004 lower pez ring y2o3
119 lam 300 716003481803 (acme) ceramic window_(uc2 coating)_m12uc2 marking al2o3
120 lam 300 719003481858 lam kiyo crystal window al2o3
121 mattson 300 1010434 ring, focus paradigm y2o3
122 novellus 300 1500339402 spindle fork al2o3
123 novellus 300 1511812300 ring insulator anod pvd300 al2o3
124 novellus 300 1512217800 vector carrier ring al2o3
125 novellus 300 1512725101 novellus c3 speed aln pec aln
126 novellus 300 1516966600 rtype long injector 9.07 aln
127 novellus 300 1525153800 sapphire pin sapphire
128 novellus 300 1525607702 vector ebr blade al2o3
129 novellus 300 1525735100 sapphire pin new type sapphire
130 novellus 300 1526533001 star injector donut ￠2.08 aln
131 novellus 300 1527366900 upper shield ring al2o3
132 novellus 300 1528161200 ring ltm insulator al2o3
133 novellus 300 1528725400 insert nut ceramic al2o3
134 novellus 300 1529282000 ceramic finger al2o3
135 novellus 300 1529356400 blade load/unload mca al2o3
136 novellus 300 1530336400 c3 spacer disk pedestal al2o3
137 novellus 300 1530681900 shield_ceramic ring 125_ al2o3
138 novellus 300 1530770800 plug esc cermic a al2o3
139 novellus 300 1530770900 plug esc cermic b al2o3
140 novellus 300 1531836400 aln star wheel 1.375l aln
141 novellus 300 1532500200 carrier ring ceramic al2o3
142 novellus 300 1532792400 inova wafer lift pin(sus) inconel
143 novellus 300 1534425900 carrier ring ahm al2o3
144 novellus 300 1536261301 sapphire pin _short sapphire
145 novellus 300 1538538400 shield_ceramic insulator al2o3
146 tel 300 1d1031564912 window shield depo_(y2o3) al2o3
147 tel 300 3d1010117611 diverge plate shin al2o3
148 tel 300 3m1025325611 stage outer ring al2o3
149 tel 300 3m1030793312 outer ring d320ti al2o3
150 tel 300 3m1030869112 lifer arm 300t al2o3
151 tel 300 3m1031271411 pick, trias lm taper al2o3
152 tel 300 3m1040600312 screw,m4x10_alo al2o3
153 tel 300 3m1040908811 tel trias lift pin al2o3
154 tel 300 3m1040909211 guide long pin wrap nut al2o3
155 tel 300 3m1045114311 pin,taper wrap al2o3
156 tel 300 3m1045114412 guide,taper pin wrap al2o3
157 tel 300 3m1045587511 plate gas dist al2o3
158 varian 300 e17270580 filament insulator al2o3
159 varian 300 e17296280 insulator dual mount al2o3
160 amat 020000298 dps metal dome al2o3
161 amat 020000453 pin guide(18x6.3x45.5) al2o3
162 amat 020000454 bushing lift pin al2o3
163 amat 020002397 liner ceramic bottom al2o3
164 amat 020002677 depo ring_alps al2o3
165 amat 020004977 isulator bushing(15*15.6) aln
166 amat 020005112 ultima side nozzle aln
167 amat 020005238 aln hdp side nozzle φ0.36 aln
168 amat 020006112 wafer blade al2o3
169 amat 020024018 020024018 pin antenna bk al2o3
170 novellus 1503433300 tube injector 4 al2o3
171 novellus 1505237500 ceramic finger al2o3
172 novellus 1505339403 spindle fork bk al2o3
173 novellus 1516966700 injector short open tube aln
174 novellus 1525184700 injector short closed aln
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爱锐精密科技（大连）有限公司
刘忠后
15640996933
辽宁大连市金州区金马路120号福佳国际大厦611室