Basic Info.
Model NO.
TN-PLZ180-II-DC-Q
Heating Temperature
Max 500ºC
Rotate Speed
1-20rpm Adjustable
Chamber Size
φ180mm×150mm
Chamber Material
High Purity Quartz
Mechanical Pump
Rotary Vane Pump
Vacuum Measurement
Resistance Gauge
Opening Mode
Top Cover Removable
Power Supply
AC;220V 50/60Hz
Transport Package
Wooden Box
Specification
360mm× 300mm× 470mm
Production Capacity
220/Month
Product Description
Hot sale factory price plasma sputtering coater with 1/2/3 target
Product Description
1. This type of small plasma sputtering coating machine adopts single-stage sputtering method, which is widely used for SEM
sample preparation or metal coating experiment.
2. Using low-temperature plasma sputtering process, there is no high temperature during the coating process, thermal damage is
barely happen.
3. This small plasma sputtering coater uses PLC +touch screen control system, easy to operate. a rotatable sample stage is
equipped.
4. It comes with small size, suitable for lab research process.
Product Parameters
Product model | TN-PLZ180-III-DC-Q |
Sample stage | Size | 100mm |
Distance from sample stage to target surface | 20~35mm height adjustable |
Rotating speed | 1~20rpm adjustable |
Heating temperature | ≤500ºC |
Temperature control accuracy | ±1ºC PID temperature control |
Plasma sputtering source | Quantity | 2 inchesx1/2/3 |
Cooling method | Water cooling/Natural cooling |
Vacuum chamber | Chamber size | φ180mm x 200mm |
Observation window | Omnidirectional visibility |
Chamber material | High purity quartz |
Open method | Top cover removable |
Upper and lower cover material | 304 stainless steel |
Pumping port | KF16 |
Intake port | 1/4 inch ferrule connector |
Power configuration | Quantity | DC power supplyx1 |
Output power | Max. 150W |
Sputtering power | 1200V |
Max. sputtering current | 50mA |
Vacuum system | Vacuum pump type | Dual-stage rotary vane vacuum pump |
Pumping port | KF16 |
Exhaust interface | KF16 |
Pumping rate | 1.1L/s(4m3/h) |
Ultimate vacuum | ≥0.1Pa |
Vacuum measurement | Resistance vacuum gauge |
Others | Power supply | AC 220V 50Hz |
Total power | 1.5kW/2kW |
Dimension | 570mm * 450mm * 500mm |
Weight | 30kg |
Detailed Photos
Notes:
1. We have plasma sputter coater with 1/2/3 target,
2. Water cooled target, rotation substrate is optional
3. Heating substrate is available
Single target plasma sputter coater
Dual target plasma sputter coater
Triple target plasma sputter coater
Company Profile
FAQ
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, having our own design team and factory, with mature technical experience, and can guarantee the quality of products and the optimal price. Q. How is your company's product after-sales service system? A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues. Q. How long is your delivery time? If I want to customize the instrument, how long does it take? A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument. Q. Our country's power supply and plug are different. How do you solve it? A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries. Q. How to pay? A.T / T, L / C, D / P, etc., it is recommended to use Made in China Trade Guarantee. Q. How is the package of goods? Delivery methods? A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements to find the most suitable way. More questions, please contact me.