Precision Devices Materials Nano Scale Measurement White Light Interference Wafer Chip Microscope

Product Description

MDAM-GS1000
White Light Interference Microscope
Equipment Overview
MDAM-GS1000 3D measuring microscope has the function of measuring three-dimensional micro-contour and roughness parameters of the surface, it covers the measurement of various samples from ultra-smooth polished surface to machined rough surface, and be used for nano-scale measurement of various precision devices and materials.
Based on the principle of white light interference technology, combined with precision Z-scan module and 3D modeling algorithm, the device surface is non-contact scanned and a 3D image of the surface is established.
Through the system software, the 3D image of the device surface is processed and analyzed, and the 2D and 3D parameters reflecting the surface quality of the device are obtained, so as to realize the optical detection instrument for 3D measurement of the device surface topography.
Equipment Functions
1. Non-contact measurement of surface three-dimensional roughness;
2. Measurement of surface microscopic three-dimensional structure;
3. Microscopic reflection spectrum measurement (optional).
Measuring Principle
Principle of white light interference microscopic measurement: White light source is used to combine incoherent light interference with high-resolution microscopic imaging technology to reconstruct microscopic three-dimensional contour with high precision, and the longitudinal measurement resolution can reach sub-nanometer level.
Micro-spectral measurement: the function of surface micro-spectral measurement and film thickness measurement can be realized by selecting spectral module.
Equipment Advantages
1. With nanometer-level longitudinal resolution, it can meet the measurement and analysis of ultra-smooth polished surfaces;
2. Simple, accurate, fast and repeatable measurement method;
3. Accurate roughness measurement covering smooth to rough surfaces;
4. Rich measurement modes support different 2D/3D measurement requirements.
Application Cases
Application Areas
1.Advanced manufacturing industry
2.Aerospace industry
3.Smart car industry
4.Optical equipment
5.Consumer electronics
6.Medical products
7.Precision machining
Technical parameters

Technical parameter	Measurement mode	PSI/VSI/super depth of field/bright field
	Single measurement field of view (20× objective lens)	500*350μm (automatic stitching)
	Angle adjustment	±12° manual
	Z-axis adjustment	20mm electric + 50mm manual (coarse and fine adjustment mechanism)
	Longitudinal scanning range	0-10mm
	Longitudinal resolution	<0.2nm
	Repeatability of longitudinal roughness measurement	0.01nm (PSI mode)
	indication error of step height measurement	<0.75% (VSI mode)
	Lateral resolution: @550nm	0.69μm (20× objective lens)
	Measurable sample reflectivity	0.1%-100%
	Measurement time	<5s (PSI mode)
Analysis function	Analysis function	3D height measurement, 3D roughness analysis, 2D dimension measurement
	3D data output	3D point cloud data, grayscale image data, customized report

Objective magnification	2.5x	5x	10x	20x	50x	100x
Numerical aperture	0.075	0.13	0.3	0.4	0.55	0.7
Optical resolution @550nm (μm)	3.7	2.1	0.92	0.69	0.5	0.4
Depth of focus (μm)	48.7	16.2	3.04	1.71	0.9	0.56
Working distance (mm)	10.3	9.3	7.4	4.7	3.4	2.0

Measurement and analysis software diagram
FAQ
1. About Price:
All of our prices are competitive and negotiable. The price varies depending on the configuration and customization complexity of your device.
2. About Sample:
We can provide sample production services for you, but you may provide some fees.
3. About Payment:
After the plan is confirmed, you need to pay us a deposit first, and the factory will start preparing the goods. After the equipment is ready and you pay the balance, we will ship it.
4. About Delivery:
After the equipment manufacturing is completed, we will send you the acceptance video, and you can also come to the site to inspect the equipment.
5. Installation and Debugging:
After the equipment arrives at your factory, we can dispatch engineers to install and debug the equipment. We will provide you with a separate quotation for this service fee.
6. About Warranty:
Our equipment has a 12-month warranty period. After the warranty period, if any parts are damaged and need to be replaced, we will only charge the cost price.