Edwards AC4b2b122200r Cert Ixh1820htx Mk1 LV Hyb mm96 Pump
Basic Info.
Model NO.
AC4B2B122200R
Oil or Not
Oil Free
Structure
Jet Flow Vacuum Pump
Exhauster Method
Entrapment Vacuum Pump
Vacuum Degree
High Vacuum
Work Function
Mainsuction Pump
Working Conditions
Dry
Brand
Edward
Edward
Stpa2206CV
Transport Package
UPS
Specification
according product size
Trademark
Edward
Origin
Britain
HS Code
8414909010
Production Capacity
20
Product Description
STPA2203CV TMS ISO250F Gas Inlet YT4V66001 The Edwards STPA803C turbomolecular pump is designed for semiconductor applications. Edwards' advanced rotor technology enables best-in-class performance and maximum process flexibility. The STPA803C is already in use and proven by major equipment manufacturers in the semiconductor and magnetic media industries. Applications Metal (aluminum), tungsten and dielectric (oxide) and polysilicon plasma etching (chloride, fluoride and bromide) Electron cyclotron resonance (ECR) etching Thin film deposition CVD, PECVD, ECRCVD, MOCVD Sputtering Ion implantation sources, beamline pumping end stations MBE diffusion Photoresist stripping Crystal/film growth Wafer inspection Load lock Vacuum chamber Scientific instrumentation: surface analysis, mass spectrometry, electron microscopy High energy physics: beamlines, accelerators Radiation applications: fusion systems, cyclotrons| Product Name | STPA2203CV |
| Power Consumption Working Current | 12v |
| Power Consumption | 2w |
| Medium | nitrogen |
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